抄録
In this study, a micro metallic valve was designed and fabricated. All of the parts are made of metals, and assembled in a unit. Sheet metal with thickness of 20 µm was used as valve plate. Sheet metal forming was applied to form the 3D structure, and surface treatment with plating Au and coating SAM (Self-Assembled Monolayer) with functional groups was carried out in order to compensate the surface roughness and to improve sealing property of the valve. An equipment was developed for evaluating flow resistance of the valve. The influence of surface conditions on the valve properties including surface roughness, mechanical properties of surface coating was investigated experimentally. Furthermore, phenomena of micro flow between two walls with surface roughness in a gap of several microns were simulated by a FEM code. Evaluation of the properties shows that the surface treatment is very effective to compensate the surface roughness and the valve is highly functional.
