日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
薄膜
窒素添加Fe/Co多層膜の熱処理による変化
星 陽一関 雅史直江 正彦
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ジャーナル オープンアクセス

1989 年 13 巻 2 号 p. 289-292

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Annealing treatment of nitrogen added Fe/Co multilayered films was performed in a rotating magnetic field of 500 Oe in a vacuum. Annealing treatment at a proper temperature causes a decomposition of nitride phase such as Fe4N, Co4N or (FeCo)4N in the film. though the temperature increases from 200°C to 350°C as a layered period dlayer increases from 36 Å to 470 Å. Accordingly, the film loses its layered structure and changes to a uniform Fe-Co alloy film.
Changes in magnetization curve of the film with annealing temperature indicate that film with low coercive force is composed of Fe-N and Co-N layers with small magnetic anisotropy and Fe-Co-N layer with large uniaxial magnetic anisotropy. The changes in coercive force Hc with the annealing temperature depend on dlayer of the film, though all of the film with dlayer above 60 Å has nearly the same minimum Hc value of about 1 Oe.
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© 1989 (社)日本応用磁気学会
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