抄録
Incident angle dependence of magnetic properties of vacuum deposited Co-Cr films was investigated. With a continuous vacuum deposition system, “continuous films” and “fixed films” are deposited on polymer-substrates moving and stopping, respectively, with incident angle of evaporated atoms from 70°(initial) to 40° (final). In fixed films, which are cut into small pieces for measurements at every incident angle region of 2.5°, hcp c-axis dispersion increases and shape magnetic anisotropy becomes large with increases in the incident angle. In continuous films, both magnetocrystalline anisotropy and shape magnetic anisotropy contribute to the magnetic anisotropy. Compared with fixed films, magnetic properties of continuous films are influenced by initial film growth region with incident angle above 60°.
