高B_sFeTa-N-O膜の軟磁気特性

抄録

Magnetic thin films of FeTa-N-O were prepared by using the opposed target type dc magnetron sputtering method in Ar+N₂+O₂ plasma. Magnetic and structural properties were investigated as a function of the flow rates of introducing O₂ and N₂ into the Ar atmosphere. High B_s (19 kG) and soft magnetic properties (H_c≤0.3Oe, μ≥3000) were obtained in wide areas of O₂ and N₂ flow rates and were kept after high temperature annealing (at 600°C) From X-ray diffracted pattern of α-Fe(110), it was found that these soft magnetic films consist of fine grains. The addition of Ta and N₂ together with O₂ in a small amount was highly effective in improving the soft magnetic properties and ther thermal stability, because it decreased the magnetic anisotropy after annealing and prevented the grain growth of α-Fe.