日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
センサー・磁気応用
マグネティック・リソグラフィの現像条件と格子の断面形状
明渡 純小山 文夫小林 成康小林 寛
著者情報
ジャーナル オープンアクセス

1991 年 15 巻 2 号 p. 493-498

詳細
抄録
A new method to make an optical diffractional grating was already reported. A periodical magnetic pattern is written in a magnetic memory medium, and a magnetic fluid is used as magnetic toner to visualize this pattern. Using this method, an optical grating can easily be formed even on a convex or concave surface. As an optical characteristic of this relief type grating is decided by a cross sectional shape, it is important to investigate this cross sectional shape for application to an encoder plate or an optical component. When the grating constant bacomes small, positions depositing magnetic fluid are changing from domain walls to magnetic domains. By analyzing the Fraunhofer diffraction pattern of the grating, the relationship between a cross sectional shape and developing conditions was investigated. According to the results, the shape is sinusoidal- or circular-arc when the grating constant is less than 10μm.
著者関連情報
© 1991 (社)日本応用磁気学会
前の記事 次の記事
feedback
Top