Ar＋N₂のイオンビームスパッタによる鉄および鉄コバルト薄膜

抄録

The characteristics of ferromagnetic metal nitride thin films were studied as a magneto-optical recording medium by using ion-beam sputtering. Especially the factor of perpendicular magnetic anisotropy was studied. The transmittance of the films was found to be related to c-axis orientation of the Fe and FeCo nitride. The FeCo nitride thin films were found to have a large value of the Faraday rotation θ=7.7 deg/μm at 780 nm. The Fe and FeCo nitride thin films were found to have high corrosion-resistance in a NaCl water solution. In cross section of ferromagnetic metal nitride thin film, the microstructure was observed by TEM to be a columnar structure composed of amorphous phase and crystalline phase about 10 nm or fess in diameter.