FeZrBM (M=Co, Ni, Cr, V) スパッタ膜の軟磁気特性

抄録

Soft magnetic properties of sputtered FeZrB films are investigated with additives of Co, Ni, Cr, and V. While FeZrB ternary films did not exhibit soft magnetic properties in our experiment, a few percent of additives make permeability high enough for magnetic head applications. These changes correspond to the variation of magnetostriction of the films. Any additive mentioned above makes magnetostriction constant positive from negative value of FeZrB film. However, the effects of Co or Ni addition on crystallization are different from those of Cr or V addition. By addition of Co or Ni, crystallization temperature (T_x) becomes lower, lattice spacing (L_s) larger. and saturation magnetic flux density (B_s) higher, while Cr or V makes T_x higher, L_s smaller, and B_s lower. In the aspect of soft magnetic properties, Co is the best additive of the four elements, and Fe_87.6Co_3.2Zr_5.8B_3.3 exhibits excellent soft magnetic properties after annealing at 550°C (B_s∼18 kG, μ∼5000).