薄膜
センダストスパッタ膜の内部応力
1992 年 16 巻 2 号 p. 243-246
詳細
1992 年 16 巻 2 号 p. 243-246
It has become clear that internal stress (σ) for thermal treated Sendust films is changed by treatment temperature, thermal expansion coefficient (α) for substrates and oxygen content in the film. Measured α value for low oxygen content Sendust film is 169×10-7. Calculated σ values, by using the α value of the Senduct film, show good agreenent with measured ones.
