Fe/Fe_xN積層膜の軟磁気特性に及ぼすFe_xN層の影響

抄録

Fe multilayered films with Fe_xN intermediate layers of various structures (Fe + Fe₄N, ε + Fe₄N, ε and Fe₂N) are prepared by reactive sputtering under various nitrogen partial pressure conditions. Effects of Fe_xN intermediate layer on coercivity (H_c), saturation magnetization (B_s) and structure of Fe/Fe_xN multilayered films are investigated. Fe/Fe_xN multilayered films with intermediate layer prepared under conditions in which Fe₂N single layer is obtained have a low H_c of less than 1 Oe. In these multilayered films, we observe that columnar growth of Fe layer is interrupted, grain size decreases below 100Å and lattice spacing of α-Fe (110) plane increases. Low H_c of Fe/Fe_xN multilayered films is thought to be caused by these results.