ECRプラズマ窒化によるFe-Zr/Fe-Zr-N軟磁性多層膜の耐熱性

抄録

Fe-Zr/Fe-Zr-N multilayered films were prepared by alternation of Fe-Zr sputtering and electron cyclotron resonance (ECR) plasma nitridation, and the thermal stability of their soft magnetic properties were inverstigated. Saturation flux density B_s = 1.8 T, coercivity H_c = 88 A/m and relative permeability μ' > 3000 (at 20 MHz) were respectively obtained on Fe₉₂Zr₈/Fe₉₂Zr₈-N multilayered film after annealing at 773 K for 3600 s. Addition of Zr for Fe/Fe-N multilayered films improved effectively the thermai stability of soft magnetic properties.