日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
センサー・磁気応用
磁気リソグラフィによるエンコード面の作製
千代 知成古谷 宏行小林 寛明渡 純
著者情報
ジャーナル オープンアクセス

1993 年 17 巻 2 号 p. 429-432

詳細
抄録
By using the magnetic lithography technique previously reported, an optical grating can be easily formed not only on a plane, but also on a convex or concave surface. since the optical characteristics of this relief-type grating depend on its cross-sectional shape, it is important to investigate the factors determining the shape of the grating in magnetic lithography so that this technology can be applied to an encoder plate. In order to improve the encoder's performance, it is necessary to control the crosssectional shape of the grating and to try to produce a grating that has no Fraunhofer zeroth-order diffraction light spot by means of magnetic lithography. Results show that the characteristics of the gratings have good repeatability in production. Conditions for developement of such gratings are investigated.
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© 1993 (社)日本応用磁気学会
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