抄録
The purpose of this study is to obtain a soft magnetic film with high saturation flux density Bs and permeability μ and controllable uniaxial anisotropy. Making a multilayer structure using Fe-N for which Bs is close to that of pure Fe and Co-Zr-Nb, a soft magnetic film having Bs∼19 kG, Hc≤0.3 Oe Hc and μi≥3300 at 1 MHz was obtained. This film retains the soft magnetic properties up to 450C, and the μi at 1 MHz annealed at 250C is greater than 4000. The uniaxial anisotropy field Hk in the range of 4 to 7 Oe can be induced by annealing while retaining the soft magnetic properties.
