(111) 面配向したセンダスト膜の磁気特性

抄録

Sendust films with (111) orientation were studied on underlying iron films deposited by the N₂ DC plasma evaporation method.The orientation of the Sendust films was found to depend on the grain size and resistance of the underlying iron films.As a result of both the deposition rate and substrate temperature being controlled during iron deposition, the grain size became smaller and resistance became higher than those of iron films deposited in a vacuum.Sendust films with (111) orientation deposited on the above underlying iron films showed good softness appeared and a magnetic permeability of about 10000.