Fe-X-O (X = Y, Nd, Sm, Gd, Tb, Dy) 系高電気抵抗膜の軟磁気特性

抄録

The magnetic properties and electrical resistivity of Fe-X-O (X=Y, Nd, Sm, Gd, Tb, Dy) films were investigated.The films were prepared by co-sputtering of Fe and X₂O₃ targets in a static magnetic field. They seem to have a granular type of structure composed of magnetic grains with a diameter well under 100Å and thin oxide boundaries with high electrical resistivity. The films have soft magnetic properties, as well as high electrical resistivities of more than 250μΩ cm, a maximum magnetic anisotropy field of 31.9 Oe, and saturation induction of about 13 kG in the as-deposited state. They also have a good frequency response of permeability. These results are attributed to the eddy current loss reduction caused by the films' high electrical resistivities, and to the higher natural resonance frequency caused by the high magnetic anisotropy fields and magnetic induction.