日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
磁気記録媒体
バリウムフェライトスパッタ薄膜の微細構造と磁気特性に及ぼす熱処理時間の影響
武井 重人森迫 昭光松本 光功劉 小晰
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ジャーナル オープンアクセス

1997 年 21 巻 4_2 号 p. 221-224

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抄録
The effects of the annealing time on barium ferrite (BaM) thin films were studied. After deposition without substrate heating, the films were annealed at 900°C in air. Films annealed for 45 s. or longer were found to crystallize and had a tendency for the c axis to be oriented in a perpendicular direction. Films with high coercivity and high squareness ratio of about 3 kOe and 0.8, respectively, in the perpendicular direction could be prepared in an annealing time of 60 s. The grain size and the roughness of the surface were increased with the annealing time.
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© 1997 (社)日本応用磁気学会
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