日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
磁気ヘッド・記録再生特性
a-SiOx: H薄膜によるHDDスライダーの 吸着力低減
浅川 寿昭栗田 和幸茨木 伸也足立 重之佐野 章信
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ジャーナル オープンアクセス

1997 年 21 巻 4_2 号 p. 273-276

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抄録
The stiction force between a medium and an a-SiOx: H film (hydrogenated amorphous SiOx) overcoat slider (50% MIG head) was investigated by means of a newly constructed stiction force tester. The stiction force was estimated from the first pulse width of the current signal of the tester's, spindle motor, because the first pulse width is proportional to the load force. No significant increase in the stiction force was observed in the range from 50% to 85%RH in the case of the a-SiOx: H film overcoat slider. However, the stiction force of a non-overcoat slider (CaTiO3 slider) increased drastically at 85%RH to almost double the stiction force of the a-SiOx: H film overcoat slider. Furthermore, the low friction coefficient of the a-SiOx: H overcoat slider was still maintained even after 50,000 CSS cycles in high humidity conditions, such as 85%RH. Therefore, the a-SiOx: H overcoat slider has great potential for application in the HDD industry.
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© 1997 (社)日本応用磁気学会
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