磁界印加堆積法によるNi-Fe/Co₆₇Cr₃₃多層膜の透磁率向上

抄録

To control the soft magnetic properties and the magnetic anisotropy of Ni-Fe/Co₆₇Cr₃₃ multilayers, an external field H_ex of about 80 Oe was applied to films grown by using a facing-targets sputtering (FTS) apparatus during the deposition of the multilayers. The relative permeability μ_r of Ni₇₉Fe₂₁/Co₆₇Cr₃₃ multilayers without a Co₆₇Cr₃₃ underlayer was drastically improved in any direction when H_ex was applied to the layers in the FTS apparatus. On the other hand, Ni₇₉Fe₂₁/Co₆₇Cr₃₃ multilayers with a Co₆₇Cr₃₃ underlayer revealed good (111) orientation of Ni-Fe crystallites, which had higher μ_r only in the H_ex direction.