1998 年 22 巻 S_1_ISFA_97 号 p. S1_135-137
The microstructures of ion-beam co-sputtered Co-C thin films were studied. As-deposited films whose carbon concentrations were more than 46 at%, consisted of a granular amorphous phase. Successive annealing transformed these films to crystal phase keeping the granular structure. This procedure fabricated fine Co particles 10 nm in diameter surrounded by graphite boundary.