抄録
A micropump with a spiral-type magnetic micromachine was fabricated. The magnetic micromachine was composed of a permanent magnet and a spiral coil. When a rotating magnetic field was applied, the machine rotated and produced a thrust force in a liquid. However, the machine remained still and pumped the liquid at the point of equilibrium between the thrust force and a force created by the field gradient. We experimentally examined the basic properties of the pump, such as the flow rate and pressure. As a result, we found that the latter two properties can be controlled by adjusting the frequency of the rotating magnetic field. The pump was able to produce a maximum pressure of 116 Pa and a flow rate of several ml/min.