抄録
The intensity profiles of pseudo-Kikuchi bands in the scanning electron microscope are obtained theoretically as a function of W using the two beam dynamical theory of electron diffraction; where W is a deviation parameter from the exact Bragg condition. According to the theory, the ratio of the abnormal to normal absorption coefficients Δμg⁄μ0 can be determined from two different parameters of the experiment; a ratio R of the maximum to minimum intensities or W values at the positions of the maximum and minimum intensities near the Kikuchi band edge in the intensity profiles across the band. The comparison between the theory and experiment is examined for the (220) pseudo-Kikuchi bands in Si. The values Δμg⁄μ0 obtained from R and W values are 0.10±0.03 and 0.20±0.05, respectively. The value obtained from W’s in this experiment agrees approximately with one quoted by Meyer-Ehmsen. However the value obtained from R is smaller than those of others. This fact is caused by the effect of inelastically scattered electrons. Moreover, the temperature dependence of Δμg⁄μ0 measured from W’s becomes almost constant in the range of the room temperature up to 600°C.
