Threshold and Energy Distribution for ECR Discharge Plasma Source

抄録

An ECR discharge plasma source obtained through the use of ferrite magnets was studied especially focusing on the threshold electric field at the breakdown and the energy distribution of charged particles in the plasma produced. The microwave frequency was a little smaller than the electron cyclotron frequency by about 0.5∼1%, which was explained clearly by the electron trapping condition. The energy distribution of electrons has the second harmonic and strongly depends on the localizing of the microwave field.