Monte Carlo Study of Dependence of Secondary Electron Emission from Copper on Incident Angle of keV Primary Electrons

抄録

The dependence of secondary electron emission from copper on the incident angle of the keV primary electron is investigated by using Monte Carlo techniques not only for the collision process of the primary electron in material, but also for that of the secondary electron, the ‘cascade’ process. The energy dependence of the secondary electron yield largely changes with the incident angle, while the energy and angular distributions of secondary electrons emitted in vacuum are rather insensitive to the angle, which is consistent with some experimental results. The cascade process reduces the dependence of secondary electron yield on the incident angle, which varies as an inverse cosine of the angle measured from the normal to the surface for high energy, although the effect of the cascade process is smaller than that of the collision process of the primary electron for keV energy.