Journal of the Robotics Society of Japan
Online ISSN : 1884-7145
Print ISSN : 0289-1824
ISSN-L : 0289-1824
Physics of the Micro World and Micromachines
Masayoshi Esashi
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Keywords: Micromachine, Physics, Stiction, Micromachining, Nanomachining
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1996 Volume 14 Issue 8 Pages 1086-1089

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