Journal of the Robotics Society of Japan
Online ISSN : 1884-7145
Print ISSN : 0289-1824
ISSN-L : 0289-1824
Microsystems and Mechanical Porperty of Thin Film
Osamu Tabata
Author information
Keywords: Microsystem, Thin Film, Mechanical Property, Micromachining
JOURNAL FREE ACCESS

1996 Volume 14 Issue 8 Pages 1090-1093

Details
Download PDF (2293K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© The Robotics Society of Japan
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top