Recently, range sensors (rangefinders to sense objective profiles) have been applied widely to industrial scenes to measure the object location or shapes. In this paper, we analyse the factors to downsize the range sensor and propose one form of a very slim range sensor to realize the result of the analysis. The key component of the downsizing is a small light scanner based on the bending motion of an elastic plate with an iron leaf by electromagnetic power. We also show the calibration method which fits to the proposed range sensor. We made a prototype of the range sensor and examined its sensing capacity. As a result, the range sensor can sense profiles in the expected accuracy. The sensor is applicable not only to robotic tracking tasks, but to many measurement tasks in narrow space.