In this paper, we describe development of a small six-component force/torque sensor based on the double-cross structure. First, we propose the double-cross structure that consists of serially connected parallel plate structures. Second, we explain how to use the parallel plate structure as a two-component force/torque sensor element that detects a force and a moment. Then the proposed force/torque sensor is shown to be designed as a six-component force/torque sensor with the ideal force sensitivity. A design detail of this sensor is explained and its prototype is shown. Finally, experimental results illustrate the performance of the prototype and the effectiveness of the proposed double-cross structure.
