2008 Volume 14 Issue 3 Pages 214-224
Time of flight type secondary ion mass spectrometry (TOF-SIMS) equipped with the cluster ion source such as SF5+, Au3+, C60+ as primary ion has been put to practical use in the last decade. Cluster ion beam has advantage of high sputtering yield and high secondary ionization yield without introducing severe damage on material surfaces. Substantial enhancement of secondary ion yield for bio-molecules is strongly demanded, and consequently, use of giant cluster ions for SIMS is attracted very recently. In this paper, the development of SIMS with the giant cluster ions (water droplet cluster) is reported.