Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
New Data Resources and Applications for AES and XPS
C. J. Powell
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2014 年 20 巻 3 号 p. 155-160

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  A description is given of several new applications of the NIST Database for the Simulation of Electron Spectra for Surface Analysis (SESSA). These applications include: (i) the determination of effective attenuation lengths for different XPS configurations, algorithms, and materials; (ii) examination of the effects of elastic scattering on film thicknesses obtained from the Tougaard QUASES software; and (iii) estimation of XPS detection limits and amounts of material in samples with complex morphologies. An overview is also given of a recent evaluation of calculated and measured cross sections for inner-shell ionization by electron impact. New recommendations have been made for K-shell and L- and M-subshell ionization cross sections. These cross sections will be available in a new NIST database that is expected to be released in 2014.

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© 2014 The Surface Analysis Society of Japan
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