Cross-section Observation of Organic Materials utilizing Ar-GCIB by TOF-SIMS

Abstract

  Application of depth profile for organic materials in TOF-SIMS (Time-of-flight secondary ion mass spectrometry) has been spread rapidly by utilizing C₆₀ ion beam and Ar-GCIB (Ar gas cluster ion beam). In order to obtain accurate chemical depth distributions, we developed a cross-section observation method in TOF-SIMS using Ar-GCIB. This report describes the result of studies for usefulness in this method. A cross-section observation maintaining molecular structures can be obtained in this method, it is therefore, useful for structure analysis of complex organic materials by depth distributions of molecular species in an accurate scale, which is difficult in three dimensional sputter depth profile.