抄録
We have calculated inelastic mean free paths (IMFPs) for 45 compounds for electron energies over the 50 eV to 200 keV range with the full Penn algorithm from the energy-loss functions of the compounds. Our calculated IMFPs could be fitted to a modified form of the relativistic Bethe equation for inelastic scattering in matter for energies from 50 eV to 200 keV. The average root-mean-square deviation in these fits was 0.60 %. The IMFPs were also compared with a relativistic version of our predictive Tanuma-Powell-Penn (TPP-2M) equation.
