Journal of Surface Analysis
Online ISSN : 1347-8400
Print ISSN : 1341-1756
ISSN-L : 1341-1756
Extended Abstracts from 8th International Symposium on Practical Surface Analysis (PSA19)
Electron inelastic mean free paths in compounds
Shigeo Tanuma Hiroshi ShinotsukaCedric J. PowellDavid R. Penn
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2019 年 26 巻 2 号 p. 106-107

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We have calculated inelastic mean free paths (IMFPs) for 45 compounds for electron energies over the 50 eV to 200 keV range with the full Penn algorithm from the energy-loss functions of the compounds. Our calculated IMFPs could be fitted to a modified form of the relativistic Bethe equation for inelastic scattering in matter for energies from 50 eV to 200 keV. The average root-mean-square deviation in these fits was 0.60 %. The IMFPs were also compared with a relativistic version of our predictive Tanuma-Powell-Penn (TPP-2M) equation.

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© 2019 by The Surface Analysis Society of Japan
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