Charge Compensation in Hard X-ray Photoelectron Spectroscopy by Electron Beam of Several Kilo-eletron-volts

Abstract

The charge compensation for the insulating material in the hard X-ray photoelectron spectroscopy (HAXPES) was investigated using the different energy types of electron flood gun. The electron energy of 5.5 keV resulted in the shifts of photoelectron lines to more proper positions and the lower peak widths compared with the conventional low-electron energy flood gun (3 eV). The charge compensation in HAXPES using the electron beam of several kilo-electron-volts was found to be a practical controlling method for the charging effect.