Improvement of mapping quality by reflection of a laser beam in Resonance-SNMS

抄録

Resonant ionization laser spattered neutral mass spectrometry (R-SNMS) is a method of surface analysis. Since the sputtered neutral particles emitted having certain angular distribution, the wavelength (Doppler) shift will be occurred. Therefore, angularly spread particles cannot be ionized by the resonant laser due to the Doppler shift. In this study, we improved the mapping quality of R-SNMS and coped the Doppler shift by using a reflected laser beam.