Abstract
“Universal Equation for Argon Gas Cluster Sputtering Yield” reported by Martin P. Seah in 2013 is introduced in this article. The sputtering yield of gas cluster ion beams (GCIBs), mainly applied to organic material analysis by X-ray photoelectron spectroscopy and secondary ion mass spectrometry, was simply expressed in Seah’s universal equation. The universal equation provides sputtering yields of various samples including metals and organic materials and useful information on sputtering processes. The background of the development of this equation was also explained and then future applications were discussed.
https://ror.org/03ptaj492 
