2015 年 23 巻 2 号 p. 414-421
A noncontact transfer method using a combination of ultrasonic levitation with flexure traveling wave has some advantages in clean environment and simple device configuration. This paper deals with the introduction of a two-dimensional transfer device using the ultrasonic levitation and its fundamental characteristics, and the measurement of generated pressure on the vibration plate. A prototype of the two-dimensional transfer device with four bolted Langevin transducers was constructed. Thrust by the flexure traveling wave was observed. The wavelength of the traveling wave of the vibration agreed with that of the pressure in a local area. Vortexes were observed all over the vibration plate. The sum of the vortexes caused driving force of the carried plate.
