Proposal of novel vector control for three-degree-of-freedom resonant actuator

Abstract

　Authors have proposed a three-degree-of-freedom resonant actuator that was able to be driven in three axes. However, a mutual interference of thrust was not considered in the conventional vector control. In this paper, we propose a novel vector control theory for three-degree-of-freedom resonant actuator. A mathematical model of d-q conversion is theoretically introduced and the effectiveness of the proposed method is verified by confirming the thrust linearity with respect to the mover position.