短ストローク6自由度アクチュエータの実験評価

抄録

　Recently, six-degree-of-freedom mechanisms are demanded in various applications such as positioning systems for semiconductor exposure equipment and camera stabilizer for a drone. The conventional systems are required some actuators and links to drive six-axis. Therefore, the size and weight increase. In order to solve these problems, we proposed the short-stroke six-degree-of-freedom actuator. The proposed magnetic structure and operating principle were verified by a magnetic field analysis using a three-dimensional finite element method. This paper describes the static thrust and torque characteristics that are experimentally clarified by using a prototype. The experimental results show that the proposed actuator can drive to six-axis and that the analysis results are valid by the comparison of the analysis results.