The 61st JSAP Spring Meeting 2014
Session ID : 19p-E8-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Electrical properties of IGZO-TFT with Al2O3 gate insulators by PE-ALD method
*Kazunori Kurishima, Toshihide Nabatame, Maki Shimizu, Shinya Aikawa, Kazuhito Tsukagoshi, Akihiko Ohi, Toyohiro Chikyo, Atsushi Ogura
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