The 61st JSAP Spring Meeting 2014
Session ID : 18p-D8-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Low-temperature fabrication of Al2O3/Ge gate stacks using post plasma oxidation
Details
Article 1st page
