The 61st JSAP Spring Meeting 2014
Session ID : 18p-PA12-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Low-dielectric constant SiCN charge trapping layer for nonvolatile memory applications(Ⅲ)
Keywords:
18p-PA12-7,
SiCN
Details
Article 1st page
