The 61st JSAP Spring Meeting 2014
Session ID : 19p-F9-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Carbon Cluster Ion Irradiated Silicon Wafers(2) -Effects of Amount and Size of Carbon Cluster on Defects Formation-
*Ryosuke Okuyama, Takeshi Kadono, Takuro Iwanaga, Yoshihiro Koga, Hidehiko Okuda, Kazunari Kurita
Author information
Keywords:
19p-F9-11
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