The 61st JSAP Spring Meeting 2014
Session ID : 19p-F9-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Proximity Gettering of Carbon Cluster Ion Irradiated Silicon Wafers (3) -Effect on Transition Metal Impurities Gettering of p/p+ Epitaxial Silicon Wafers-
*Takuro Iwanaga, Takeshi Kadono, Ryosuke Okuyama, Yoshihiro Koga, Hidehiko Okuda, Kazunari Kurita
Author information
Keywords:
19p-F9-12
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