The 61st JSAP Spring Meeting 2014
Session ID : 19p-F9-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 61
Location : [in Japanese]
Date : March 17, 2014 - March 20, 2014
Effects of Light Element Ion Beam Implantation on Transition Metal Impurities Proximity Gettering of Silicon Wafers
*Yoshihiro Koga, Kazunari Kurita, Hidehiko Okuda, Takeshi Kadono, Ryousuke Okuyama, Takurou Iwanaga
Author information
Keywords:
19p-F9-13
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