JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 75th JSAP Autumn Meeting 2014
Session ID : 19a-A17-4
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Autumn Meeting

Number : 75

Location : [in Japanese]

Date : September 17, 2014 - September 20, 2014

Flatband voltage measurements of Si-MOS capacitors with La2O3/HfO2/SiO2 multi-stacked gate dielectrics
*Ryo Fukui, Yoshinori Nakamura, Kuniyuki Kakushima, Yoshinori Kataoka, Akira Nishiyama, Hitoshi Wakabayashi, Nobuyuki Sugii, Kazuo Tsutsui, Kenji Natori, Hiroshi Iwai
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Keywords: 19a-A17-4
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© 2014 The Japan Society of Applied Physics
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