The 75th JSAP Autumn Meeting 2014
Session ID : 18a-A12-8
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Autumn Meeting
Number :
75
Location :
[in Japanese]
Date :
September 17, 2014 - September 20, 2014
Crystallization of amorphous IZO, IGO and IGZO thin films (1):Crystallization of amorphous IZO and IGO films