JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 75th JSAP Autumn Meeting 2014
Session ID : 18a-A12-9
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Crystallization of amorphous IZO,IGO and IGZO thin films(2):Crystallization and device property of IGZO
*Ayaka SukoJunjun JiaShinichi NakamuraEmi KawashimaFutoshi UtsunoKoki YanoYuzo Shigesato
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Keywords: 18a-A12-9, IGZO
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© 2014 The Japan Society of Applied Physics
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