The 62nd JSAP Spring Meeting 2015
Session ID : 12p-A29-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Study for hydrogen annealing effect after nitrogen plasma cleaning on interface of HfO2/Al2O3/In0.53Ga0.47As
Details
Article 1st page
