JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 62nd JSAP Spring Meeting 2015
Session ID : 12p-A29-6
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Study for hydrogen annealing effect after nitrogen plasma cleaning on interface of HfO2/Al2O3/In0.53Ga0.47As
*Seiko NetsuToru KanazawaYasuyuki Miyamoto
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Keywords: 12p-A29-6, HfO2, Al2O3, InGaAs
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© 2015 The Japan Society of Applied Physics
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