The 62nd JSAP Spring Meeting 2015
Session ID : 12p-A29-6
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
62
Location :
[in Japanese]
Date :
March 11, 2015 - March 14, 2015
Study for hydrogen annealing effect after nitrogen plasma cleaning on interface of HfO2/Al2O3/In0.53Ga0.47As