JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 62nd JSAP Spring Meeting 2015
Session ID : 12p-A29-7
Conference information

Host: The Japan Society of Applied Physics

Name : JSAP Spring Meeting

Number : 62

Location : [in Japanese]

Date : March 11, 2015 - March 14, 2015

LSI Diversification in the Future with 3-D Integration Technology
*Tetsu TANAKA
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Keywords: 12p-A29-7, 3-D Integration Technology
CONFERENCE PROCEEDINGS FREE ACCESS

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