The 62nd JSAP Spring Meeting 2015
Session ID : 12p-A29-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Effects of CTE mismatch between different materials on transistor performance in 3D integration
Keywords:
12p-A29-8,
Integration technology
Details
Article 1st page
