The 62nd JSAP Spring Meeting 2015
Session ID : 11p-B5-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
AC performance improvement by RMG module for 14nm FinFETs and beyond
*Mitsuhiro Togo, M. Joshi, H. V. Meer, C. Yong, B. Liu, X. He, X. Wu, S. Y. Mun, X. Zhang, D. Konduparthi, J. Lian, G. Bohra, W. H. Tong, C. Y. Xiao, D. Triyoso, E. Banghart, S. M. Pandey, A. Wei, R. Pal, R. Carter, M. H. Nam, M. Eller, S. Samavedam
Author information
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