The 62nd JSAP Spring Meeting 2015
Session ID : 12a-P12-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 62
Location : [in Japanese]
Date : March 11, 2015 - March 14, 2015
Study on the formation of Al germanate on Ge substrate by radical-enhanced ALD
Tomoya Yokohira, *Kousei Yanachi, Byeonghak Yoo, Chiaya Yamamoto, Junji Yamanaka, Tetsuya Sato, Hiroshi Okamoto, Yukio Fukuda
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